PRODUCTS

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We provide a complete Spares Program for the Lam Research Autoetch product line (e.g. 490, 590, 690).

In addition to offering individual spares, we also run a modular repair and refurbishment program on all sub-assemblies. For example:

  • 853-001198-001 Gate Linkage
  • 853-001198-002 Gate Linkage
  • 853-001154-007 Arm Assy
  • 853-001154-008 Arm Assy
  • 853-000577-001 Phase Mag
  • 853-007526-001 Gate Drive Cylinder
  • 853-007526-002 Gate Drive Cylinder
  • 853-004106-001 Entrance Lifter
  • 853-004109-001 Exit Lifter
  • 853-007555-001 Brake Assy
  • 853-009520-001 4 - pin lifter
  • 853-001142-001 Match Control
  • 853-001983-005 End Point Detector
  • 853-009300-001 Gap Drive Controller
  • 853-090260-001 Gap Drive Assy
  • 853-004073-002 Indexer
  • 810-009281-001 PCB Gap Driver
  • 810-004115-001 ASSY PCB MEMORY CARD
  • 810-004115-002 ASSY PCB MEMORY CARD
  • 810-001984-001 Matrox PCB
  • 810-001984-002 Matrox PCB
  • 810-007215-001 Power Driver
  • 853-007526-001 ASSY GATE DR CYLINDER HUMPHREY
  • 810-001314-001 ASSY PCB TTL 7604
  • 810-001314-002 ASSY PCB TTL 7604
  • 810-001314-003 ASSY PCB TTL 7604
  • 810-005672-001 ASSY PCB TTL I/O PWR

We can also turn around complete units in the following areas:

Gap Drive, Lifter Assembly, Piston Assembly, CRT, PCBs, Control Assembly, Power Supplies, Indexer Units, Gate Drive / Door Assemblies.

Lam AutoEtch 490, 590, 690, and 790
Wafer Size: 3″, 100mm – 150mm
The AutoEtch product line includes the 490, 590, 690, and 790 series for etching polysilicon, oxide, aluminum, and tungsten film, respectively.

Continued improvements in both reliability and performance have enabled PDS Enterprizes to offer the AutoEtch platform as a ideal product for applications involving line widths of 0.8 micron or greater and wafer sizes of six inches or smaller.

PDS Enterprizes Remanufacturing Capabilities Include:
• Remanufactured Lam AutoEtch Etch Systems
• Chamber Retrofits and Upgrades
• Wafer Size Conversions
• Professional Onsite Service
• System Repurposing
• Complete Installations, Startup, and Process Support Including Full Warranty

Lam AutoEtch 490, 590, 690, and 790
Wafer Size: 3″, 100mm – 150mm

The AutoEtch product line includes the 490, 590, 690, and 790 series for etching polysilicon, oxide, aluminum, and tungsten film, respectively.

Continued improvements in both reliability and performance have enabled PDS Enterprizes to offer the AutoEtch platform as a ideal product for applications involving line widths of 0.8 micron or greater and wafer sizes of six inches or smaller.

PDS Enterprizes Remanufacturing Capabilities Include:
• Remanufactured Lam AutoEtch Etch Systems
• Chamber Retrofits and Upgrades
• Wafer Size Conversions
• Professional Onsite Service
• System Repurposing
• Complete Installations, Startup, and Process Support Including Full Warranty

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